AJA International ATC-M Series Hybrid Systems are versatile tools that combine various thin film deposition, ion milling and analytical operations in a single chamber (Hybrid Systems) to allow the in-situ transfer of substrates from process to process without breaking vacuum. These systems can be built in HV or UHV configurations, and in either cylindrical or box chamber styles. Multi-Techniques employed include: - Magnetron Sputtering - E-Beam Evaporation - Thermal Evaporation - Ion Milling - Ion Beam Deposition - Pulsed Laser Deposition - Ellipsometry - Rapid Thermal Anneal - Oxygenation and Nitridization - XPS/AUGER/LEED Analysis - MBE - RHEED - MOS - SIMS - RIBE
