Silex's commitment to offering Piezoelectric foundry capabilities started well over 15 years ago with the pioneering of a MEMS foundry offer in PiezoMEMS, providing both PZT and AlN processing. Over the last decade, Silex has had a close collaboration with ULVAC in developing the highest performance sputtered PZT and can today offer its foundry customers a fully holistic approach to PZT process integration, with cutting-edge deposition, etch, measurement and analysis capability. Serving innovation leaders, we are adding novel piezoelectric materials to our foundry offer such as KNN.
