Silicon-Based Deposition

By SiMPore, Inc.

Amorphous Silicon: PVD deposited 5 to 50 nm thick Single/Poly Crystalline Silicon: As thin as 25nm thick Silicon Dioxide: Thermal, Sputter, or PECVD 10-4,000 nm thick Silicon Nitride: Stoichiometric and Si-rich LPCVD 5-2,000 nm thick