By Northwestern University - NUANCE Center
SEM Column - Cold FEG source - Resolution: < 5nm Imaging Detectors - Standard lower SE detector for topographical information. - In-lens detectors for ultra high-resolution imaging with energy filtering, including SE, HA-BSE, and LA-BSE. - Beam deceleration mode for improved low voltage imaging, up to 2.5 kV bias. - STEM-in-SEM detector for low voltage (<30kV) BF- and DF-STEM imaging. Analytical Detectors - EDS:Oxford X-Max 80 mm 2 SDD EDS detector and AZtec software for elemental characterization.
