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Cleanroom & FoundryInfrastructure & Training

Via Technologies

By Silex Microsystems AB

Some of Silex's early customer products incorporated classical doped poly silicon vias. In 2004, Silex saw its first patented “highly doped silicon” TSV technology (Sil-Via®) integrated by its customer into high volume cell phone application for a 2.5D interposer. This established Silex as a leading provider of through substrate via technologies. Since 2004 we have seen a purpose driven expansion of the portfolio of TSV technologies into metal TSV's in silicon (Met-Via®), for low resistance applications, and more recently through glass via solutions (TGV) in glass substrates for low parasitics in high voltage and high frequency applications.