By Northwestern University - NUANCE Center
SEM Column - Schottky FEG source - Resolution: < 5 nm Imaging Detectors - Standard lower SE detector for topographical information. - In-lens detector for ultra high-resolution imaging with energy filtering, including SE and HA-BSE. - High-sensitivity dedicated BSE detector for high compositional contrast even at low kV. - GBSH-S (GENTLEBEAM™ Super High mode) for improved low kV imaging, up to 5kV bias. - Low-vacuum BSE mode for enhanced charge suppression. Analytical Detectors - EDS and WDS: integrated Oxford Ultimax 65 mm 2 SDD EDS detector and Oxford Wave 700 with five diffraction crystals for combined EDS/WDS analysis, including WDS mapping. Other - Super Hybrid Lens (SHL), allows for observation of magnetic materials even at short working distances, and reduces aberrations to improve resolution, especially at low kV.
