By Center for Functional Nanomaterials Brookhaven
Brookhaven’s Instrumentation Department has been designing, fabricating, and testing silicon (Si) sensors for nearly 40 years. These sensors support a wide range of applications, including imaging, tracking, and spectroscopy across photon science, high-energy physics, and nuclear physics. Our Capabilities - Fabrication of complete sensors—such as strip, pixel, drift, and low-gain avalanche diode sensors—in a class 100 cleanroom - Design of sensors on 4-inch or 6-inch wafers - Design of Si charge-coupled device (CCD) sensors, including associated readout and control electronic systems that meet or exceed the state of the art in sensitivity, speed, efficiency, compactness, and power consumption - Development of thermal and mechanical designs of CCD packages - Optimization of devices and process flows via technology computer-aided design simulations - Characterization of sensors at electrical probe stations (current vs. high voltage or capacitance vs. high voltage) - Characterization of the electro-optic performance of sensors and integrated systems, with troubleshooting of identified performance issues - Verification of quality control of all assembly and test operations, including fully automated electro-optic test stands with scripted acquisition, analysis, and reporting functions - Evaluation of CCD electro-optic performance in cryogenic test stands - Access to a cryogenic probe station at Brookhaven’s Center for Functional Nanomaterials and equipment at other user facilities - Integration and test of large-format sensor arrays, up to 12 × 12 cm and 144M pixels - Separation of single sensors from wafers through a laser dicing machine, which enables the cutting of arbitrary shapes, including holes - Engagement with foundry services from design through testing and procurement of custom sensors
