By Center for Functional Nanomaterials Brookhaven
For more than 20 years, the Silicon Sensor Fabrication Cleanroom in Brookhaven Lab’s Instrumentation Department has been a main center for the development and production of prototype silicon (Si) radiation sensors. These in-house-developed sensors are being used across the nation and abroad in fields including nuclear and high-energy physics, photon science, and x-ray astronomy. Our Capabilities - Application of standard cleanroom techniques, including oxidation and annealing of 4-inch and 6-inch Si wafers with high-temperature furnaces, chemical removal of materials via wet etching, reactive-ion etching, double-sided lithography, sputtering, and rapid thermal processing - Customization of sensor designs and technology process flows based on application specifications - Creation of arbitrarily shaped sensors from wafers for specific application needs - Evaluation of wafers at high voltages while collecting high-accuracy low-current-level measurements - Collaboration with on-site cleanrooms containing additional processing capabilities, including one dedicated to germanium processing in Brookhaven’s Physics Department and another at the Center for Functional Nanomaterials that can be used for dielectric film depositions and other processes
