By Center for Functional Nanomaterials Brookhaven
The Instrumentation Department’s Micro/Nanofabrication Laboratory is dedicated to the design, synthesis, processing, and characterization of components and devices at the micro- and nanoscales. Visiting experimenters are encouraged to actively participate in the design process by learning fundamental fabrication processes such as plasma etching and high-aspect-ratio lithography. Astronomy, particle physics, materials science, and biology are among the fields that we support. Our Capabilities - Patterning of materials in our class 100 cleanroom equipped with resist spinners, developing tanks, and etching stations - Optimization of devices and components through high-resolution structural imaging and chemical microanalysis with scanning electron microscopes (SEMs) - Access to other instruments at Brookhaven’s user facilities, including SEMs and transmission electron microscopes at the Center for Functional Nanomaterials and x-ray beamlines at the National Synchrotron Light Source II
