Depending on the thickness of the layer to be analyzed different approaches may be applied. For thicker layers (about > 100 nm), an analysis of cross-sections by Scanning Electron Microscopy (SEM) and X-Ray Micro-Area Analysis (EDS) can be done. By this the elemental composition and structure can be evaluated. The main organic components can be examined by Infrared Spectroscopy (FTIR / ATR-IR) or IR microscopy. For thinner layers specific surface analytical and sputter depth profiling techniques can be used. The Secondary Ion Mass Spectroscopy (TOF-SIMS) is used to identify organic compounds such as polymers, lubricants or Additives. The X-Ray Photoelectron Spectroscopy (XPS) is suitable for the quantitative analysis of the elemental composition and the bonding states at the surface and in the depth of the layer (sputter depth profiling). Especially for depth profiling of organic compound,s argon cluster sputtering can be used.
