By Northwestern University - NUANCE Center
Features - Analyzer type: 180-degree double-focusing, hemispherical analyzer with 128-channel detector - X-ray source type: Monochromated, micro-focused, low-power Al K-Alpha X-ray source - X-ray spot size: 10 to 400 um (adjustable in 5 um step) - Depth profiling: EX06 monatomic Ar ion source and cluster Ar ion source - Maximum sample area: 60 mm x 60 mm - Maximum sample thickness: 20 mm - Sample transfer: Fully automatic transfer - Air free transfer: equipped - Sample rotation: equipped