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Equipment ServicesInfrastructure & Training

OEM Spare Parts

By Lam Research

Providing OEM parts for every fab requirement Our comprehensive portfolio of high quality, cost-effective parts and contracts is designed to balance performance, availability, and cost-effective operation of our equipment. As an original equipment manufacturer (OEM), we use learning from actual equipment data to maximize operational efficiency for our spare parts. Lam’s robust business processes, quality control systems, and strong worldwide supply chain ensure that chipmakers have reliable equipment that delivers predictable and repeatable results. We deliver high-quality, low-defect OEM parts for high tool performance and fast ramp up. These process-of-record (POR) parts are released under strict revision control and produced only by Lam qualified vendors, leading to a high level of part-to-part consistency.