By ASML
We refurbish ‘classic’ PAS 5500 and TWINSCAN lithography systems for a new life and a new purpose. We measure a machine’s life in decades, not years – almost every single ASML lithography system sold is still in use at a customer fab. In 1991, seven years after the company was founded, we launched the PAS 5500, which turned out to be our breakthrough platform. This system was able to dramatically reduce manufacturing times for our customers, and its modular design enabled them to produce multiple generations of advanced chips using the same system. Since 1997, our installed base extension teams have been buying back PAS 5500 machines that customers no longer need, refurbishing them for a wide range of chipmaking applications, including sensors, MEMS, photonics and more. Today, our range of refurbished systems also includes early TWINSCAN XT and NXT DUV systems. In our PAS refurbishment factories in Taiwan and the Netherlands, systems are fully disassembled into individual modules, cleaned, inspected, repaired and reassembled into like-new machines that meet original specifications, backed by a new warranty. TWINSCAN XT and NXT refurbishments follow a standardized, configuration-driven approach, using predefined instructions, validated parts and structured build-and-test steps to restore systems to an agreed performance baseline – delivering results that meet the same acceptance criteria as comparable system configurations.
