By Melbourne Centre for Nanofabrication
Vaxxas Pty. Ltd., which was established to develop the Nanopatch TM, engaged with MCN to increase the outputs of their trial patches. By providing Vaxxas with access to state-of-the-art development equipment and expertise, MCN has accelerated and improved the production of the Nanopatch TM. The Nanopatch TM is manufactured using mono-crystalline silicon wafers which are subjected to deep-reactive ion etching (DRIE), the same proccess that is commonly used to fabricate components of smart phones and other microtechnology devices. MCN has helped to fine tune the Nanopatch TM production process so that the layers deposited on these wafers achieves better uniformity, increasing the output from each wafer. Furthermore, MCN has allowed Vaxxas to move from four inch wafers to six inch wafers, once again increasing the yield. MCN also hosts two DRIE systems which enables them to double their final outputs by processing wafers in parallel.
