By Northwestern University - NUANCE Center
SEM Column - Schottky FEG source - Resolution: < 10 nm Imaging Detectors - Standard lower SE detector for topographical information. - Radially segmented BSE detector for compositional contrast and separation of LA-BSE and HA-BSE. - Low-vacuum SE or BSE modes for enhanced charge suppression. - ESEM mode up to 4000 Pa chamber pressure for hydrated samples or humidity/pressure-controlled experiments. Analytical Detectors - EDS and EBSD: Integrated Oxford Ultim Max 40 mm 2 SDD EDS detector and Oxford Symmetry S2 EBSD detector for elemental and mineralogical characterization. Other - Heating stage for in situ experiments up to 950 deg. C. - Electron beam lithography (eBL) system.
