By Institut Catala de Nanociencia i Nanotecnologia (ICN2)
The Quanta 650 FEG is a versatile Field Emission Scanning Electron Microscope which provides high resolution imaging at high vacuum, low-vacuum and also extended vacuum (environmental SEM or ESEM) for the characterization of all type of samples (conductive, non-conductive and wet samples) and performing in-situ dynamic experiments. This microscope features a large chamber with the capacity of analyzing up to 16 samples at the same time and compatible with 8 inches wafers. Technical characteristics - Voltage: 200 V to 30 kV - Beam current: up to 200 nA - Resolution: - High-vacuum mode: 1.2 nm @ 30 kV (SED) // 0.8 nm @ 30 kV (STEM) - Low-vacuum mode (10 Pa to 130 Pa pressures): 1.4 nm @ 30 kV (SED) - ESEM (130 PA to 2600 Pa pressures) mode: 1.4 nm @ 30 kV - Sample holder kit including cross-sectional, multi-stub and STEM holders - Beam deceleration to enhance low kV performance - Detection systems: - Secondary electrons: Everhart-Thornley, gaseous SE (ESEM mode), Through-lens (TLD) - Back-scattered electrons: low kV solid state BSED - Transmitted electrons (STEM): BF and DF - EDS analysis using an Inca 250 SSD XMax20 detector which is Peltier cooled with 20 mm 2 active area and 129 eV resolution - Peltier stage for humidity cycling experiments and cooling down to -25 ºC - Heating stage up to 1000 ºC Applications - High-resolution imaging of the morphology and topography of all types of samples, with a large chamber which fits specimens up to 20 cm in diameter - Study of non-conductive and wet specimens without the need of pretreating them - Imaging with compositional contrast using BSED - In-situ studies of the evolution of samples upon heating (up to 1000 ºC) - In-situ dynamic humidity studies (up to 100% humidity) using a Peltier cell - Chemical analysis via EDX for point analysis and chemical maps
