By Melbourne Centre for Nanofabrication
Electron beam evaporator (Intlvac Nanochrome II) Atomic layer deposition (Cambridge Nanotech Fiji F200) Atomic layer deposition (Cambridge Nanotech Savannah S100) Thermal evaporator (Angstrom Engineering EvoVac) Gold electroplating (Digital Matrix PMT-16) Nickel electroplating (Digital Matrix SA1000) Sputtering (Intlvach Nanochrome AC/DC) Sputtering (Anatech Hummer BC-20 RF/DC) Furnace (HiTech Furnace) Furnace (SVCS four stack horizontal furnace) Plasma enhanced CVD (Oxford instruments PLASMALAB100) Diamond CVD (Seki Diamond AX6500X and AX6300) Polymer Glovebox (Mbraun MB200)
