By Ebatco
Ebatco’s JEOL 6610LV SEM is equipped with a Bruker XFlash 6|30 Energy Dispersive X-Ray Spectrometer (EDS) system, which expands the capabilities of the SEM to rapid qualitative and quantitative element identification and chemical analysis. This EDS system measures characteristic X-rays emitted from the sample during the bombardment by an electron beam. The energy spectra of X-rays and their counts reveal the elemental composition of the analyzed volume. Working in tandem, the SEM and EDS link the surface morphology with its chemical composition. The EDS system is highly efficient, versatile and powerful. With a 30 mm 2 silicon drift detector, over 1500 kcps count rate, improved heat sink and maximum solid angle, the EDS system is optimal for both microanalysis and spectral imaging. Its high input count rate allows for faster analysis. Its live quantification in intervals of 100 milliseconds or less is convenient for recognizing changes in the spectrum across a sample. Feature Analysis Point analysis and line scans are some of the analysis features available on this EDS system in which specimens are analyzed at a point or along a selected line. Point analysis measures the elemental composition of the spot while line scan shows an elemental concentration profile along the line. In addition to point analysis and line scans, advanced features like object analysis can be performed on this EDS system. During the object analysis, continuous electron beam scan moves over the object’s area, thereby reducing strain and possible beam effect on the sample. Multi-object analysis, a combination of multipoint and object analysis can be carried out as well. This feature allows different spots or areas on the sample to be analyzed automatically. Spectral Mapping Basic elemental map can be generated to show the concentration distribution of different elements in the sample using virtual colors. Position tagged spectrometry (Hypermap) is an advanced mapping technique that stores complete spectra for every pixel on the map. It permits the user to conduct data analysis post processing. It is useful when working with samples that require phase reconstruction, feature recognition, or are inhomogeneous. With a generated hypermap, one can perform point analysis, line profiling, elemental mapping and quantitative analysis without re-run the sample. Qualitative Analysis The energies of the emitted X-ray lines under electron beam scan are specific to each element in the sample and they are almost independent of chemical bonding of atoms. Therefore, the X-rays are characteristic in nature and can be used to determine or identify elements in a sample with unknown compositions. Qualitative analysis of samples using EDS for elements with atomic numbers above beryllium is easy, fast, non-destructive and widely-used. Quantitative Analysis Quantitative analysis can be performed using EDS by counting the x-rays at the characteristic energy levels for each element. Standardless, standard-based, direct reference, or combined methods may be used to analyze the acquired data. Generally, accuracy for standard based analysis can be fine-tuned to about 1%. Compared to the standardless method, the standard-based quantification yields the highest possible accuracy. However, standard-based measurements involve considerably more effort. Direct reference based analysis compares a sample against an available standard or a reference sample. It reduces the need for a standard library while obtaining reliable results even on powders or ceramics. True standardless analysis available on the Bruker EDS system is a unique P/B-ZAF based quantification method. This method relies on peak-to-background ZAF evaluation (P/B-ZAF) and provides reliable quantification results for all types of samples. The P/B-ZAF algorithm is based on a physical model using information obtained from bremsstrahlung background radiation as an internal standard for quantification. Peak-to-background (P/B) ratios used for calculating quantitative data are more robust than net intensities used by other standardless analysis algorithms. Applications Alloys and Metals Biofilms Biological Samples Ceramics Chemical Etching Chemical Imaging Cleaning Problems Contamination and Stain Investigation Corrosion Analysis Cross-section Analysis Failure Analysis Feature Imaging Feature Measurement Fiber Characterization Foreign Material Identification Forensic Analysis Fractography Fracture Characterization Freeze Drying Samples Geochemical Analysis Geological Samples Glasses Grains and Grain Boundaries Gunshot Residue IC Failure Analysis Iron and Steel Material Identification Medical Devices Metallographic Analysis Metallurgy Micrographs Microstructure Evaluation Nano Materials Nano Particles Particle Sizing Phase Identification Plastic Deformation Plastics and Polymers Scratch and Scuffing Surface Defect Analysis Thin Films and Coatings Tribological Surfaces Wear Mechanisms Wear Surfaces Welds Instrument: EDS BrukerXFlash 6|30 SDD Instrument Key Specifications Detection Limit 0.1% mass concentration Precision and Accuracy Precision: < 1%;Accuracy: 3-5% Resolution 123eV Mn Kα, 53eV F Kα, 45eV C Kα Sensitivity 0.1 pg Detector Size 30 mm 2 Throughput>1500 kcps input rate
