NW
Structural & Compositional AnalysisCharacterization & Testing

ION TOF M6: Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS)

By Northwestern University - NUANCE Center

Features - High lateral resolution (< 50 nm) with the new Nanoprobe 50 for elemental mapping - Mass resolution > 30,000 and superior sensitivity for impurity detection - Super high resolution for depth profiling with Cs, Oxygen, and Ar cluster gun - Highly efficient charge neutralizer for insulating samples - Comprehensive raw data collection for post data process - Huge sample holder for multiple samples mounting - Unique delayed extraction mode for high transmission with high lateral and high mass resolution simultaneously - Unmatched dynamic range and detection limits - New flexible, push-button, closed-loop sample heating and cooling system for long-term operation without user interaction (-150 to 600C) - Sophisticated SurfaceLab 7 software including fully integrated Multivariate Statistical Analysis (MVSA) software package