By Northwestern University - NUANCE Center
Schottky field emission electron source (FEG) Resolution: <1 nm Lower SE detector for topographic imaging Five-segment BSE detector for compositional contrast and 3D reconstruction In-lens SE, HA-BSE, and LA-BSE detectors for ultra-high-resolution imaging Low-vacuum imaging for charge suppression Cathodoluminescence (CL) imaging for crystallinity, defects, and optical properties Beam deceleration mode (up to 2.5 kV bias) for enhanced low-kV imaging STEM-in-SEM detector for BF- and DF-STEM imaging (<30 kV) Image resolution up to 40,960 × 30,720 pixels EDS: Oxford Ultim Max 170 mm² SDD and Ultim Extreme 100 mm² windowless detectors for quantitative elemental analysis, including low-kV and light-element analysis (down to Li) EBSD: Oxford Symmetry S3 EBSD with Near-Axis TKD for high-resolution crystallographic characterization Unity BEX: Combined BSE/X-ray detector for ultra-fast, high-resolution color imaging
