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Lithography & NanopatterningFabrication & Surface Engineering

Heidelberg DWL 66fs High-Resolution Laser Writer

By Jan Koum Center for Nanoscience and Nanotechnology, Tel Aviv University

Manufacturer and model: Heidelberg-Instrument DWL 66fs. Description: High-Resolution Laser writer, mask fabrication tool and Photolithography Solutions. Ideal for microelectronics, MEMS, microfluidics, sensors, non-standard substrates, and advanced packaging. Equipped with cutting-edge mask fabrication machines, our facility ensures unparalleled precision in photolithography mask production. This supports research and development (R&D) applications where accuracy and high-resolution patterning are critical.