By Institut Catala de Nanociencia i Nanotecnologia (ICN2)
The Magellan 400L is a Field Emission Scanning Electron Microscope equipped with a newly developed electron column with a monochromator, UC (UniColore) Technology. This microscope features excellent capabilities in the more traditional high energy (15-30 kV) SEM and STEM imaging, but also has an outstanding performance at low beam energies with subnanometer resolution for unmatched surface sensitive imaging. The recently attached X-Max Ultim Extreme EDX (Oxford Instruments) converts this microscope in a unique tool, as it allows an ultrafast compositional nanoanalysis and mapping with an unprecedented sensitivity and energy resolution, even for light elements such as lithium. Technical specifications - Landing energies: 50 V to 30 kV, continuously adjustable - Beam current: 0.6 pA - 22 nA - Resolution: 0.8 nm@ 15 kV, 0.9 nm @ 1 kV - Beam energy spread below 0.2 eV - Detector systems: - Secondary electrons: Everhart-Thornley and through-lens (TLD) - Back-scattered electrons: TLD and retractable vCD (for BSED at low voltages) - Transmitted electrons (STEM): BF, DF and HAADF - Sample holder kit including cross-sectional, multi-stub and STEM holders - Beam deceleration to enhance low kV performance - 5-axis high precision specimen stage 100 mm x 100 mm with piezo control - Navigation camera - Integrated plasma cleaner Applications - Extremely high resolution (< 1 nm) for topography and morphology studies of all types of samples, even non-conductive specimens - Surface-sensitive high resolution imaging by working at low operating voltages (below 1 kV) - Imaging of the structure of samples using STEM mode - Study of biological samples, such as cells and tissues
