By Ebatco
X-ray diffraction is not limited to powders or bulk materials – it is one of the best ways to characterize the structure of thin films. Whether single or poly crystalline, XRD can measure the lattice parameters of thin films and coatings very accurately. A film’s strain state, degree of relaxation, and orientation with respect to the substrate can be determined. In some specialized cases, the alloy composition can be found. We can also test nanoscale thin films using reflectivity. XRR measures the thickness of thin films up to 500 nanometers thick and can provide measurements of surface and interface root mean square (rms) roughness with sub-nanometer resolution. This technique is admirably suited for films with multiple layers as well, such as heterostructures or superlattices. XRR is not restricted to crystalline materials and works for amorphous films as well.
