Introduction Titanium nitride (TiN) is a multi-functional coating material. - It is a ceramic nitride, making it a hard coating material with low coefficient of friction for tribological applications - It is a conductive material as well, allowing it to be used for electrical contact in electronics applications, including semiconductors - As a superconducting material, if finds use in sensors such as SQUID - Its interesting optical properties recommend it as a candidate for plasmonic devices - Its lustrous gold color has made it widely used for decorative coatings. All these properties can be imparted to surfaces as coating through thin film deposition. Magnetron sputtering is a simple and convenient method for applying this material. However, many materials and devices cannot be subjected to the high temperatures often used in TiN deposition recipes. This Application Note gives specific guidance for the deposition of TiN with the substrate at room temperature.
