By Institute of Physical Chemistry, Bulgarian Academy of Sciences
Piezo driven flexure stage XY scanner with 90μm scan range and <0.5nm sensor noise (ADev,0.1Hz-1kHz), noise sensor non-lenearlity <0.05% (ADev/full travel) operates in both open-loop and closed-loop, with completely separated axes avoiding crosstalk; Sensored Z scanner with 15μm range for both open-loop and closed-loop operation with <0.25nm sensor noise and sensor non-linearity <0.05%.
