By Melbourne Centre for Nanofabrication
The process Resistive thermal evaporation is another form of physical vapour deposition and can be used to deposit metals, organic, and inorganic polymers. In this method, electrical energy is used to heat a filament which in turn heats a deposition material to the point of evaporation. The process can be performed at very high levels of vacuum to eliminate collisions with foreign particles and therefore fewer tendencies to introduce film impurities. High deposition rates can be achieved and lower energy particles can reduce substrate damage. The uses Polymer solar cells and flexible electronics. The instrument MCN’s thermal evaporation system is the Intlvac Nanochrome II. It uses heat to evaporate a high purity source material that moves through a vacuum chamber and deposits a thin film on a substrate. Thermal Evaporation is most commonly used for single metals such as gold, silver or aluminum.
