By Canatu
Canatu CNTs provide the versatility and reliability needed for highly engineered solutions. Both individual CNT properties and CNT membrane morphology can be precisely tuned. For example, the number of CNT walls can be modified, offering flexibility between single-walled (SWCNT) and multi-walled CNTs (MWCNT). Multi-walled CNTs are particularly beneficial for optimizing covalent coating processes. Additionally, tube diameter and chirality can be modified independently of wall count. Bundle size and membrane morphology can be tuned during synthesis to optimize coating processes. This allows for controlling factors such as reducing the total surface area that needs to be coated or limiting exposure to potentially harmful environments. Additionally, to fine-tune coating properties, the surface chemistry of CNTs can be pre-treated through targeted surface functionalization. If specific anisotropic properties, such as mechanical or electrical properties, are desired, the orientation of the CNT network can be precisely controlled. However, an isotropic orientation is preferred in EUV applications where minimizing scattering and flare is essential. This versatile platform technology can be further enhanced through chemical functionalization and coatings. For example, coatings can be used to filter out deep ultraviolet (DUV) photons in optical filters or to create gas seals that separate compartments in EUV machinery. CNTs can be coated using conventional PVD, ALD, or CVD methods, as well as a novel electrochemical coating technique. The electrochemical approach offers advantages such as improved conformality and precise thickness control. Finally, metal nanoparticles can be removed to ensure membrane purity. Since metals are commonly used as catalysts in CNT synthesis, purification is often essential. Any outgassing or material ejection at high temperatures could damage other components within EUV machinery.
