By George Washington University - Nanofabrication and Imaging Center (GWNIC)
The Raith VOYAGER is a high performance electron beam lithography (EBL) instrument featuring: - 50kV eWrite column technology - 50MHz pattern generator - 200mm wafer handling capability - High throughput single digit nanolithography - Stitch-free lithography due to fixed-beam-moving-stage (FBMS traxx) and modulated-beam-moving-stage (MBMS periodixx)technologies
