By Melbourne Centre for Nanofabrication
Probe stations physically acquire signals from the electronic ports of semiconductor/RF/microwave devices. They utilise micro-manipulators which allow the precise positioning of thin needles on the surface of a device or thin film. When a device is being electrically stimulated, the signal is acquired by the mechanical probe and is displayed on a supporting instrument such as an oscilloscope or network analyser. Probe stations are used primarily for research and development in the fields of electronics and materials science. One of the main advantages of a probe station is the ability to test device function prior to wire bonding and packaging. It is therefore often used in the failure analysis and quality assurance testing of semiconductor/RF/microwave devices. MCN’s probe station is a Signatone WL-1160 RF/Microwave. This probe station is designed for high-frequency (up to 67 Ghz), high-power, and millimetre wave applications where non-resonant operation is critical. It is also available for DC probing. It is fitted with a 150 mm diameter circular chuck for holding a wide variety of sample sizes. It includes a high-powered microscope for optimal viewing of the test area. Its key features include 150mm and 200mm manual X-Y motion control, 50x50mm microscope stage control and separate contact/plate height control with up to 30mm Z motion control of the plate. It holds up to four S-96MW microwave micropositioners and features a vibration damping table which eliminates vibration interference from outside. Jandel RM3000 multi-height probe stand provides a solution for a wide variety of measurements such as sheet and bulk resistance of the sample. The probe mechanism can be raised and lowered meaning that samples ranging in thickness from thin films to large ingots can be measured.
