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Structural & Compositional AnalysisCharacterization & Testing

SEM – where optical microscopes are stretched to their limits

By IMT Masken und Teilungen AG

Anyone producing nm structures should also be able to measure nm structures. On this basis, a scanning electron microscope was introduced in 2015. We are particularly proud of the fact that we are able to examine large substrates up to 200 mm in diameter. The system also has EDX (x-ray analysis) for the precise determination and analysis of foreign matter.