By Northwestern University - NUANCE Center
Features SEM Column - Tungsten filament source. - Resolution: <30 nm. Imaging Detectors - Standard lower SE detector for topographical information. - 5 segment BSE detector for compositional contrast (3D reconstruction capability). - Low-vacuum SE or BSE modes for enhanced charge suppression. Analytical Detectors - EDS:Oxford X-Act 10 mm 2 SDD EDS detector and Aztec software for elemental characterization. - WDS:Oxford Wave 500 WDS system.
