NW
Structural & Compositional AnalysisCharacterization & Testing

Focused Ion Beam (FIB) Target Preparation for Atom Probe Tomography (APT)

By Karlsruhe Nano Micro Facility (KNMF)

Target preparation by focused ion beam (FIB) was used to produce needle-shaped samples for atom probe tomography (APT) to investigate the oxidation behavior. The three-dimensional elemental distribution at near-atomic resolution obtained by APT revealed the presence of nanosized SiO₂ particles formed during high-temperature oxidation within the passivating Cr₂O₃ oxide scale. These particles are one of the key factors contributing to the alloy's exceptional high-temperature oxidation performance and were detected only through the use of KNMFi facilities.