By Institute of Physical Chemistry, Bulgarian Academy of Sciences
Spectral range 190-2100 nm. Double Monochromator System for UV-Vis range. Computer controlled varirble angle goniometer with angle range 35° - 90° in steps of 0.01°, allowing variable angle spectroscopic ellipsometry (VASE). Computer controlled 200mmx200 mm XYZ stage. Computer controlled mictrospots- choice og 8 different spot size to suit the feature size of sample. Temperature controlled cell+600 °C. Electrochemical cell. Sealed cell for thin film characterization inder non-air ambient conditions. DeltaPsi software for controlling all hardware operation of the system, data acquisition, sample structure modeling, ellipsometric measurements analyses.
