By Structured Materials Industries, Inc.
• III-V to Nitride • III-V to Oxide • Nitride to Oxide Structured Materials Industries, Inc. provides specialized engineering services to Convert existing MOCVD equipment from one material system to another. SMI has a long history in manufacturing MOCVD tools and components and has now extended this capability to enable customers to economically adapt pre-existing MOCVD equipment from one material system to another. Examples are the conversion of excess III-V production MOCVD tools to meet oxide contact layer deposition needs, the conversion of excess nitride tool to pursue ZnO research and development, and conversion of excess III-V tools to II-VI materials. Alternatively, systems can be converted to incorporate plasma or UV enhancement.This service extends to tools from all MOCVD vendors as well as to enhancing existing home-built R&D systems. Rotating Disc Reactors • Emcore/Veeco • Thomas Swan • EMF • Many others Non-Rotating Disc Reactors • Aixtron • EMF CVD Equipment • Many others Homebuilt reactors/Systems • Horizontal tube • Vertical static • Other Gas Delivery Systems • Bubbler, Sublimator,Gas,and Flash …Evaporator Sources • Purifiers • Switching Manifolds • Dopant Dilution Manifolds • Pressure Control Control Systems • Manual Systems of obsolete Systems to …Automated Systems with mimic …… …screen/spreadsheet control format Exhaust Systems • Reducing atmospheres to oxidizing …atmospheres • Oxidizing atmospheres to reducing atmospheres • Other New Process Environment Compliant Spare Parts
