NW
Equipment ServicesInfrastructure & Training

System refurbishment

By ASML

We refurbish 'classic' PAS 5500 and TWINSCAN lithography systems for a new life and a new purpose. In our PAS refurbishment factories in Taiwan and the Netherlands, systems are fully disassembled into individual modules, cleaned, inspected, repaired and reassembled into like-new machines that meet original specifications, backed by a new warranty. TWINSCAN XT and NXT refurbishments follow a standardized, configuration-driven approach, using predefined instructions, validated parts and structured build-and-test steps to restore systems to an agreed performance baseline – delivering results that meet the same acceptance criteria as comparable system configurations.