Nova i570® HP Highest performance IM solution Nova i570® HP is Nova’s most advanced integrated metrology platform and the leading member of the Nova i570® product family. Nova i570® HP provides the highest metrology performance, process control and productivity capabilities for the most advanced logic and memory process nodes Highlights and Benefits 01 Highest Throughput 02 Superior Variation Control 03 Highest Accuracy 04 Compatible with Nova i550® Highest Throughput
Nova Prism is a highly advanced field-proven platform designed to meet the tightest metrology and high-productivity requirements. Nova Prism utilizes a combination of comprehensive spectral information with advanced modeling and machine-learning capabilities, to address complex challenges in optical critical dimensions. The platform’s unique combination of information channels improves the robustness of incoming process variability. The exclusive SI technology reveals unique information about the measured sample and enhances sensitivity and robustness to the monitored structural dimensions and material properties. A new dimension in Optical CD
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Market-leading Integrated Metrology for CMP process control The Nova i580 is the most advanced high-performance integrated metrology platform for CMP process control.It is designed to support the manufacturing of advanced logic and memory technology nodes, as well as advanced packaging devices, featuring a unique optional capability for Wafer Edge Metrology.This innovative platform further solidifies Nova's leadership in Integrated Metrology for CMP process control. Highlights and Benefits 01 Industry's Highest Throughput 02 Superior Variation Control 03 Highest Accuracy 04 Edge Met
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High-End platform optimized for most complex 3D applications Nova MMSR+ is a high-end standalone dimensional metrology platform targeted for critical dimensions (CD) and thin film measurements for complex Optical CD applications. The combination of robust hardware, advanced modeling and machine learning algorithms offers faster throughput, high precision, and accuracy, critical for yield and cost of ownership optimization in a high-volume production environment. Highlights and Benefits 01 Multiple Data Channels 02 Optimized Channel Selection 03 Robust Platform
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Data-Empowered Machine Learning The Nova Fit® modeling solution is a state-of-the-art machine learning algorithms hub, maximizing signal information with an open platform for reference metrology. For dimensional metrology it leverages machine learning and data-driven algorithms to maximize the power of traditional modeling of optical critical dimensions (OCD) and works with Nova MARS® physical modeling engine and Nova Fleet Management®. In materials metrology, and specifically for Nova VeraFlex® IV, Nova Fit offers a versatile s
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