NW
SPF Tergeo-EM Plasma Cleaner
PreparationInstrumentation

SPF Tergeo-EM Plasma Cleaner

By Northwestern University - NUANCE Center

Wire bonding, flip-chip underfill, device encapsulation, and decapsulation SEM/TEM sample cleaning for carbonaceous contamination removal and oxide reduction Surface treatment before biomedical coating and improve the hydrophilicity of medical implants Optics, glass, and substrate cleaning before epoxy bonding Photoresist ashing, descum, and silicon wafer cleaning PDMS, microfluidics, glass slides, and lab-on-a-chip Improve bonding for metal-to-metal or composite Improve bonding for plastic, polymer, and composite materials The Tergeo-EM is a versatile, tabletop plasma cleaning system for Electron Microscopy, designed to remove hydrocarbon contamination and modify surfaces on TEM/SEM samples, grids, and holders using a completely customizable oxygen and/or argon plasma recipe. It features dual plasma modes (direct immersion & remote/downstream), supports TEM holders brands (JEOL), offers automatic & pulsed operation, and includes a plasma sensor for precise control, making it ideal for cryo-EM prep and sensitive material cleaning.