GuardianPro® 1900P, GuardianPro® X / F / S, GuardianPro® C platforms GuardianPro® C, PuroMaxx® 2 Tracking and visibility capabilities across GuardianPro® platforms
PreciseFlex robots are designed to automate repetitive handling tasks where automation must operate safely alongside people. These robots support manufacturers looking to improve consistency and throughput without introducing rigid automation architectures that are difficult to change. PreciseFlex robots are commonly used for applications such as electronics test & handling, machine tending, part transfer and pick-and-place. Their flexible design allows manufacturers to deploy automation incrementally, adapt workflows over time, and apply automation where it delivers the most value within existing operations.
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Vacuum robots provide precise wafer handling and transfer within process tools, maintaining consistent positioning and repeatability. Configurations support advanced processes, including high-temperature environments. Brooks solutions: MagnaTran® Vacuum Robots, MagnaTran® High-Temperature Robots, Leap™ Vacuum Robot Platforms
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Vacuum systems coordinate wafer transfer across atmospheric and vacuum environments, integrating EFEM, load ports, and process modules. These systems maintain consistent flow between process steps and support stable production performance. Brooks solutions: Marathon® Vacuum Systems, Marathon® EFEM Platforms, Load Port Systems
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SMIF Contamination-Controlled Environments and Interfaces Controlled environments reduce contamination risk and support consistent transport and processing across fab infrastructure. The demands for 200 mm, SMIF interface automation continues to be strong as the need for new power devices within EV vehicles and data centers require new technology. As customers need to improve yield and cost of 200 mm factories, Brooks provides proven interface solutions to the majority of equipment tools and the capability to engineer integration for new tools. Qualified SMIF Interfaces Supporting 50 OEMs for 200 mm Compound Semiconductor Fabs
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