The probe tips can accumulate contamination layers that prevent electrical contact to the sample. One method for cleaning the tips in situ is to perform a burn-in. This entails carefully driving current through two crossed tips in order to heat them and evaporate any contaminants. The Tip Cleaning Module provides a guided workflow for performing this procedure.
The PS8 Prober Shuttle is already the most compact and highly integrated nanoprobing system in the market. Nonetheless, we found a way to add positional encoders to the platform. This latest feature enables fast and efficient nanoprobing workflows. The ability to automatically pre-align the probes is especially important for probing on the most recent technology nodes where beam sensitivity is an issue and thus, very low acceleration voltages are required. Using pre-defined alignment positions, all eight probes can be brought from their individual parked positions into close vicinity to each other at a consistent height above the sample - at the click of a button! This eliminates the tedious pre-alignment task which involved constant corrections of the astigmatism and/or necessitated switching to higher acceleration voltages. The PS8e utilizes the MM4 ultra-flat three-axis manipulators that exhibit unmatched stability and precision. The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others. Specifications Overview - Total height: 10 mm - Total width: 140 mm - Maximum sample area: 20 mm x 20 mm - Maximum sample height: 20 mm - depending on the sample area and load lock dimensions - Weight: 200 g + SEM/FIB dovetail - Clean cable management from flange to rack - Non-magnetic design - Ready for 3 nm and beyond Next generation micromanipulators A = left / right B = up / down C = in / out - Operating range: A = 5 mm, B = 90°, C = 5 mm - Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm - Low drift: 1 nm/min Encoder features - Park & restore probes with a click of a button - Drive substage to pre-defined locations - Fast cycle time - Automatic tip pre-alignment allows lowkV workflows Low-capacity, low-current measurements - Noise: <25 fA @ 1 Hz - Insulation leakage current: <50 fA/V - Signal conductor resistance: <5 Ω - Maximum voltage: 100 V - Maximum current: 100 mA All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice. Advantages Compact & flexible - Small and practical - Plug-and-play system with modular components - Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility) - Fast setup and removal - Pioneering cabling technology - Non-magnetic design for use with immersion lenses - Lightweight platform is simply placed on your SEMs sample stage - Can be tilted to FIB angle e.g. for circuit edit or delayering applications - Easy to retrofit to existing tools Clear & simple - Intuitive control interfaces and software - User-friendly and easy to learn - Quick and easy probe tip exchange - Compact, stand-alone electronics - Effortless work with multiple manipulators Robust & stable - Excellent stability - Low drift (1 nm/min) - Reliable operation (one year endurance test) - Virtually insusceptible to vibrations Fast & precise - High operating velocity (up to 10 mm/sec) - Sub-nanometer resolution (0.05 nm) - No backlash or reversal play - Extensive working range - Coarse and fine displacement in one drive - Fast pre-positioning at the click of a button
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The MM3A-EM Probe Station comprises up to eight MM3A-EM micromanipulators combined with our long range substage with 30 mm travel in X and Y. The substage can optionally be equipped with positional encoders yielding 50 nm repeatability. Another option is to add a Z axis with a range of 3 mm. The entire platform can be mounted on the SEM's stage in a few short minutes and just as easily be removed in order to return the microscope to its previous state. The MM3A-EM micromanipulators are equipped with low-current, low-capacity measurement capability and are fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others. The platform can also be fitted with a heating stage for temperatures of up to 450°C. Other customizations are available upon request (e,g, integrated LED illumination). Specifications Overview - Total height: 31 mm - Total width: 180 mm - Maximum sample size: 70 mm — 70 mm, max 10 mm height - Weight: ~1200 g Three-axis micromanipulators A = left / right B = up / down C = in / out - Operating range: A = 240°, B = 240°, C = 12 mm - Resolution A: 7 nrad (0.5 nm) - Resolution B: 7 nrad (0.2 nm) - Resolution C: < 0.05 nm - Low drift: 1 nm/min Low-capacity, low-current measurements - Noise: 25 fA @ 1 Hz - Insulation leakage current: <50 fA/V - Signal conductor resistance: <5 Ω - Maximum voltage: 100 V - Maximum current: 100 mA Substage - Travel X and Y: 28.5 mm - Speed: up to 2 mm/s - Resolution: < 0.5 nm - Repeatability: 50 nm (optional) - Angular deviation: < 1 µrad - Load: 500 g - Optional Z-drive range: 3 mm - Z Lift capability: 25 g - Sample mounting: Clip or 2 x M3 holes All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice. Advantages Compact & flexible - Easy to install and remove for a high degree of flexibility - Plug-and-play system with modular components - Interfacing solutions for most SEM/FIB instruments - Fast setup - Ample space for large samples - Large working range (30 mm x 30 mm substage travel) - Pioneering cabling technology Clear & simple - Intuitive control interfaces and software - User-friendly and easy to learn - Quick and easy probe tip exchange - Compact, stand-alone electronics - Effortless work with multiple manipulators Robust & stable - Excellent stability - Low drift (1 nm/min) - Reliable operation (one year endurance test) - Virtually insusceptible to vibrations - Fast pre-positioning by hand Fast & precise - High operating velocity (up to 10 mm/sec) - Sub-nanometer resolution (0.2 5 nm) - No backlash or reversal play - Extensive working range - Coarse and fine displacement in one drive
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The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 7 nm technology node - and beyond! In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision - the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage. The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others. Specifications Overview - Total height: 10 mm - Total width: 140 mm - Maximum sample area: 20 mm x 20 mm - Maximum sample height: 20 mm - depending on the sample area and load lock dimensions - Weight: 200 g + SEM/FIB dovetail - Clean cable management from flange to rack - Non-magnetic design - Ready for 5 nm and beyond Next generation micromanipulators A = left / right B = up / down C = in / out - Operating range: A = 5 mm, B = 90°, C = 5 mm - Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm - Low drift: 1 nm/min Low-capacity, low-current measurements - Noise: <25 fA @ 1 Hz - Insulation leakage current: <50 fA/V - Signal conductor resistance: <5 Ω - Maximum voltage: 100 V - Maximum current: 100 mA All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice. Advantages Compact & flexible - Small and practical - Plug-and-play system with modular components - Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility) - Fast setup and removal - Pioneering cabling technology - Non-magnetic design for use with immersion lenses - Lightweight platform is simply placed on your SEMs sample stage - Can be tilted to FIB angle e.g. for circuit edit or delayering applications - Easy to retrofit to existing tools Clear & simple - Intuitive control interfaces and software - User-friendly and easy to learn - Quick and easy probe tip exchange - Compact, stand-alone electronics - Effortless work with multiple manipulators Robust & stable - Excellent stability - Low drift (1 nm/min) - Reliable operation (one year endurance test) - Virtually insusceptible to vibrations Fast & precise - High operating velocity (up to 10 mm/sec) - Sub-nanometer resolution (0.05 nm) - No backlash or reversal play - Extensive working range - Coarse and fine displacement in one drive
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Plug-in compatible with PS8 platforms - extends the range of sample sizes to 120 x 120 mm The NW4 is a load lock compatible platform that can host up to four MM3A-EM micromanipulators. It is designed to enable nanoprobing and failure analysis on large substrates while making use of the load lock in order to minimize cycle times and maximize chamber cleanliness. The MM3A-EM micromanipulators are equipped with low-current, low-capacity measurement capability and are fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others. A key advantage this platform yields is its compatibility with the PS8 Prober Shuttles. By combining this setup with a PS8, labs are fully equipped to address the entire range of nanoprobing and fault localization/isolation workflows from complete packages on large substrates all the way down to individual transistors at device level. Specifications Overview - Platform dimensions 162 mm x 134 mm - Space for up to four MM3A-EM manipulators - Load Lock Compatible - Same Connector as Prober Shuttle - Low Current, Low Noise measurement - Noise: <25 fA @ 1 Hz - Insulation leakage current <50 fA/V - Signal conductor resistance 6.5 Ω - Maximum voltage 210 V - Maximum current 200 mA Three-axis micromanipulators A = left / right B = up / down C = in / out - Operating range: A = 240°, B = 240°, C = 12 mm - Resolution A: 7 nrad (0.35 nm) - Resolution B: 7 nrad (0.25 nm) - Resolution C: < 0.05 nm - Low drift: 1 nm/min All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice. Advantages Compact & flexible - Easy to install and remove for a high degree of flexibility - Plug-and-play system with modular components - Interfacing solutions for most SEM/FIB instruments - Fast setup - Ample space for large samples - Pioneering cabling technology Clear & simple - Intuitive control interfaces and software - User-friendly and easy to learn - Quick and easy probe tip exchange - Compact, stand-alone electronics - Effortless work with multiple manipulators Robust & stable - Excellent stability - Low drift (1 nm/min) - Reliable operation (one year endurance test) - Virtually insusceptible to vibrations - Fast pre-positioning by hand Fast & precise - High operating velocity (up to 10 mm/sec) - Sub-nanometer resolution - No backlash or reversal play - Extensive working range - Coarse and fine displacement in one drive
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