High Throughput Thin Film Deposition System The TriQ is an automated and versatile large chamber triple head sputter coater offering unparalleled ease of use and flexibility based on your application needs. Recommended for controlled thin film deposition for electron microscopy sample preparation and material fabrication. Product features - Turbomolecular pumped system with ultimate vacuum of 1x10⁻⁶ mbar, enabling high quality coatings - Triple head design offering even deposition of thin film coatings across samples up to 8” in diameter - Optimised planetary stages for deposition across 6” and 8” diameter samples - Integrated Film Thickness Monitor (FTM) to control deposition of coating - Intuitive and responsive touchscreen colour panel design - Multi-colour LED visual status indicator offering process updates - Pre-set recipes for standard protocols resulting in sample reproducibility - Customisable recipes enabling users to tailor process parameters to their specific requirements - Compatible with a range of target materials Typical applications Electron Microscopy - High resolution imaging for detailed surface and structural analysis - Enhanced surface conductivity for improved imaging performance - Uniform fine-grained coatings for superior sample preparation - Reduced charging effects and improved analytical accuracy Materials Research - Precision thin film deposition for advanced applications - Controlled materials fabrication with consistent results - Capability to process large-area substrates efficiently - Support for research, development, and prototype production Advanced Materials - Novel batteries and fuel cells - Development and study of quantum materials - Semiconductor materials for electronics and microdevices - Photonic materials for optical and communication systems Specifications Instrument Specifications - Unit weight: 52 Kg - Packed weight: 64 Kg(appoximatly) - Instrument size: 440 mm (W) x 562 mm (H) x 551 mm (D) - Instrument size with chamber open: 440 mm (W) x 912 mm (H) x 551 mm (D) - Chamber size: 300 mm Ø diameter, 220 mm (H) - Specimen stage: 80 mm (H) from chamber base (standard stage required for sputtering tall samples), 150 mm and 200mm Ø diameter substrate. - 145mm (H) from chamber base (extended stage required for sputtering short samples), 150 mm and 200mm Ø diameter substrate. Performance - Ultimate vacuum: 1x10⁻⁶ mbar or lower - Operational vacuum: 5x10⁻⁶ mbar - Vacuum gauge range: 1000 mbar to 6.7x10⁻⁹ mbar - User interface: Touch screen colour display Power Supply - Supply Voltage: 100-240 V, 50-60 Hz - Power Consumption(Incl. rotary pump): 1500 VA Deposition - Deposition Current: 1-150 mA - Deposition Rate: 0.1-20 nm/min (e.g. for gold) - Sputter Timer: 0-60 min - Sputter Target: Target Disc style, 57 mm Ø diameter x 0.3 mm thickness(chromium supplied as standard) Film Thickness Monitor (FTM) - Quartz crystal: Gold,12 mm Ø diameter, 5 MHz RC Quartz Crystals - Thickness range:1-2000 nm - Tooling factor range: 0.1-10
The TurboQ ES is an automated and versatile turbo pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy (EM). Suitable for use with FE-SEM, FEG-SEM and FIB-SEM. The TurboQ ES is a combined system is capable of both sputtering and carbon coating. The deposition head inserts can be swapped to allow for Metal evaporation/aperture cleaning and Glow Discharge. Key Features - High vacuum instrument for ultra-high-resolution EM up to and beyond 200k - Ultra fine grain size for high-resolution analysis - Combined system capable of sputter and carbon coating - Rapid cycle time for maximum sample throughput - Tilt stage design giving uniform coating of complex 3D structures - Film Thickness Monitor (FTM) to control deposition of coating - Intuitive and responsive touchscreen colour panel design - Multi-colour LED visual status indicator offering process updates - Pre-set recipes for standard protocols resulting in sample reproducibility - Customizable recipes for tailored applications - Easy and quick set-up of profiles - Multiple stage options based on application need
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Key Features - Recommended for low-medium magnification - Suitable for use with Tungsten/LaB₆ SEM and Benchtop SEM - Capable of carbon fibre evaporation (carbon rod evaporation available as option) - Rapid cycle time for maximum sample throughput - Tilt stage design giving uniform coating of complex 3D structures - Film Thickness Monitor (FTM) to control deposition of coating - Intuitive and responsive touchscreen colour panel design - Multi-colour LED visual status indicator offering process updates - Pre-set recipes for standard protocols resulting in sample reproducibility - Customizable recipes for tailored applications - Easy and quick set-up of profiles - Multiple stage options based on application needs Details The RotaQ E is an automated and versatile rotary pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy (EM). The rotary pumped carbon coater is suitable for use with Tungsten/LaB₆ SEM and Benchtop SEM. The RotaQ E is an automatic carbon fibre coater designed for TEM applications including for carbon coating of TEM grids and elemental analysis.
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The RotaQ S is an automated and versatile rotary pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy (EM). The Rotary pumped coater is suitable for use with Tungsten/LaB₆ SEM and Benchtop SEM. The RotaQ S is an automatic sputter coater for noble metals. Available sputtering targets include Au, Au/Pd, Pd, Ag, Pt/Pd. Key Features - Recommended for low-medium magnification - Suitable for use with Tungsten/LaB₆ SEM and Benchtop SEM - Sputter coater for noble metals. Au target offered as standard. Au/Pd, Ag, Pt, Pt/Pd available as options. - Rapid cycle time for maximum sample throughput - Tilt stage design giving uniform coating of complex 3D structures - Film Thickness Monitor (FTM) to control deposition of coating - Intuitive and responsive touchscreen colour panel design - Multi-colour LED visual status indicator offering process updates - Pre-set recipes for standard protocols resulting in sample reproducibility - Customizable recipes for tailored applications - Easy and quick set-up of profiles - Multiple stage options based on application needs
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Key Features - Turbomolecular pumped system with ultimate vacuum of 1x10⁻⁶ mbar, enabling high quality coatings - Dual head design offering sequential deposition of thin film coatings under high vacuum conditions - Optimised stages for uniform deposition across 4” and 6” diameter samples - Integrated Film Thickness Monitor (FTM) to control deposition of coating - Intuitive and responsive touchscreen colour panel design - Multi-colour LED visual status indicator offering process updates - Pre-set recipes for standard protocols resulting in sample reproducibility - Customisable recipes enabling users to tailor process parameters to their specific requirements - Compatible with a range of target materials Details Multilayer Thin Film Deposition System The DuoQ is an automated and versatile large chamber dual sputter coater offering unparalleled ease of use and flexibility based on your application needs. Recommended for controlled thin film deposition for electron microscopy sample preparation and material fabrication.
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