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AJA International
The AJA A300-XP UHV Magnetron Sputtering Sources are the next generation, "expanded performance" version of the industry standard A300 SERIES magnetron sputtering sources that have dominated the high end, UHV sputter gun market since 1991. New "expanded performance" features include higher pressure
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AJA International
The AJA Educational Series system has been designed in collaboration with educators. It is accessible, technically and financially, with simplicity and low cost of operation while focusing on its role as a learning tool. Its manual modes of operation provide a hands-on experience in managing vacuum
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AJA International
Sputtering of chalcogenides is particularly challenging, as material which builds up on the chimney of the sputter gun has a strong tendency to flake, shorting out the anode to the target. Our anti-shorting gun design for chalcogenides shields the anode-target gap, which is proven to allow much long
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AJA International
The ATC-HY Multi-Chamber Hybrid Deposition Tool combines two Hybrid Process Chambers, each featuring e-beam and thermal evaporation, confocal magnetron sputtering, ion beam etching with a 360 degree tilt, and a water-cooled substrate holder. In addition, a third process chamber features post anneal,
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AJA International
AJA International ATC Flagship Series Sputtering Systems are versatile PVD coating tools which can be built in a variety of configurations to satisfy most requirements. These systems are built around AJA's unique A300-XP (UHV) or Stiletto Series (HV) magnetron sputtering sources which feature in-sit
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AJA International
Dual UHV ATC 1800/2200E (Sputter/ E-Beam) system with (4)A320-XP 2 " UHV sputter sources with in-situ tilt, (2) 4-pocket 15cc UHV linear e-guns, RF ion source, 1200 l/s turbopumps, 850°C rotating substrate heaters with RF bias, computer control, and common vertex load-lock for 100 mm Ø substrates.
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AJA International
Our versatile design utilizes a stainless steel box chamber with double hinged door and removeable side plates. This allows us to have these chambers readily available in stock, and are easily customizable per our customer’s requirements.Chambers can be equipped with multi-pocket electron beam sourc
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AJA International
AJA International ATC-B Series Batch Coating Systems are custom engineered sputtering and evaporation systems built to handle smaller production runs of multiple substrates. Cylindrical or box style chambers are employed depending on the specific requirement. For extended process times, horizontal m
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AJA International
AJA International ATC-E UHV Series Electron Beam Evaporation Systems are available in ATC-1800E and ATC-2200E cylindrical, UHV style chambers. These physical vapor deposition systems offer exceptional value while delivering optimal performance and utilizing top quality sub-components. They inherit m
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AJA International
AJA International ATC-M Series Hybrid Systemsare versatile tools that combine various thin film deposition, ion milling and analytical operations in a single chamber (Hybrid Systems) to allow the in-situ transfer of substrates from process to process without breaking vacuum. These systems can be bu
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