Obducat has received an order from a customer in Europe for an optical aligner system delivered by the company's American partner NxQ (Neutronix Quintel). The order value amounts to SEK 4.8 million and delivery is expected to take place during the first half of 2026. Obducat acts as distributor in the transaction and receives a lower margin compared to sales of the company's own lithography systems. The ordered system is an advanced optical lithography system configured for multiple types of UV-based resist exposure, including high-precision...
Fully automated coater and developer The Microcluster tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette coater developer. The Microcluster tool is configured with four modules and offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with excellent uniformity and process repeatability..
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Fully automated wet processing Track tools The Microcluster WET Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette wet processing solutions. The Microcluster WET tools are configured with five modules or more which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET Track tools offers a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership.
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Obducat’s revolutionary Rotating Covered Chuck Technology (RCCT™) process environment design provides for: - A completely sealed solvent saturated atmosphere - Minimal turbulence around the substrate eliminating rotational corner effects on squared substrates, enabling industry leading uniformity across the entire substrate at lower spin speeds. - Superior coating uniformity on submicron layers as well as for thick resist layers compared to open bowl. - Reduced process cost and improved environmental profile by lowering material consumption. - Elimination of Backside Rinse (BSR).
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