By Nanovac AB
The GALAXY μTVAC system is a compact versatile thermal vacuum simulation chamber with an easy-access test chamber equipped with a thermal test table. The unique clam-shell chamber design allows for easy access to the thermal test table making it easy for the test engineer to mount the test object and attached any diagnostic/control cabling that is required. The access ports can be customized to customer requirements. Description Data Test chamber volume 20 l Base pressure <1x10 -6 torr Thermal range (standard 1) 223K to 400K Thermal range (extended) 2 90K to 573K Pump speed >250 l/s Rough vacuum pump type Dry scroll High vacuum pump type Turbo molecular Dimensions (L x W x H) 870 mm x 516 mm x 1188 (closed chamber) Voltage 3φ 380-415V 50Hz or 3φ 190-230V 60Hz 1 Other temperature ranges are available, this is a demonstration of standard capability. 2 Require access to LN 2 supply.
The R&D system, PVD-2-RS is our low cost PVD system, utilizing two resistive sources for deposition.
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We also manufacture and design custom PVD (physical vapor deposition) systems for demanding thinfilm R&D applications.
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We are also manufacturing reverse engineered consumable parts for plasma etch and deposition systems.
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Horizontally loaded thermal vacuum test chambers allows for horizontal loading of the DUT (device under test). Our solutions are to a large extent custom designed, as dimensions of the DUT many times drive the size of the chambers. Inner diameters typically range from 500mm in diameter up to several meters depending on the enduser test requirements. We can deliver with hinged doors in both the front and rear of the chamber, alternatively having only one end with a door. The door can be left or right hinged, or mounted on a sliding mechanism. By default the thermal test plate is installed on a sliding rail mechanism to simplify loading/unloading and setup of the test campaign.
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