Micron 2 (µII) Stage - Linear Stage Is our AI-SBS-50000-UII fit for your requirements? Scanning / Smooth Continuous Movement: N/A Step and Settle: Fit No Movement on Power Loss: Best Fit Aperture / Open Center: N/A Precision: Fit Throughput: Best Fit Product Specifications Model AI-SBS-50000-UII Stage Linear Stage Travel 500 mm (+/- 250 mm) Dimensions (Length x Width x Height) 793 mm x 258 mm x 69 mm Brake Options Standard: No Brake Included; Optional: Pneumatic Release, Spring Engage Brake (-PBRK); Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) (-Pbrk) Dimensions (Length x Width x Height) 815 mm x 258 mm x 69 mm (-Ebrk) Dimensions (Length x Width x Height) 865 mm x 258 mm x 69 mm Drive Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Feedback Non-Contact Optical Linear Encoder Bearings Dual Recirculating Ball Rail Bearings Cables High Flex, 10M Cycle, 3m Length Structure Anodized Aluminum 6061-T6 Environment Ambient Operating Temperature 0°C to 50°C Humidity 10% to 80% Non-Condensing Performance Specifications (STD / ULTRA) Linear Displacement Accuracy +/- 24 µm / +/- 2 µm Backlash 0 nm Bidirectional Repeatability +/- 1.0 µm Resolution Standard: ~4.88 nm after 4096 Interpolation; Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) Straightness In Y +/- 8 µm / +/- 4 µm Flatness +/- 8 µm / +/- 4 µm Pitch +/- 18 arc-sec Yaw +/- 18 arc-sec Roll +/- 18 arc-sec Max Velocity 0.3 m/s Max Peak Acceleration 0.5 G Max Payload Capability With Axis Oriented Horizontally 70 kg Max Payload Capability With Axis Oriented Vertically 40 kg Assembly Mass 15.5 kg
Nano Z® – Dual Voice Coil Stage with Air Bearings When Nanometer-Level Vertical Precision Is the Priority Some applications place ultimate Z-axis precision above almost every other consideration. ALIO's patented NANO Z® architecture combines air bearings with dual voice-coil motors to provide frictionless vertical motion in a compact platform. By aligning vertical force with the payload, the architecture reduces the cantilever effects that can translate into pitch, yaw and roll errors at the work point. The system offers up to 50 mm of travel, while variable counterbalancing enables demanding payloads such as wafer chucks to be managed without surrendering nano-level positioning performance. Air-bearing operation also eliminates mechanical contact and associated friction, supporting extremely smooth motion and repeatability into the low double-digit nanometer range. For semiconductor processing, advanced metrology and other applications where vertical motion can directly influence measurement or process integrity, NANO Z® provides precision by architecture rather than compensation. View datasheet
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ALIO’s Micron 2 Rotary Stages utilize frameless torque motors and angular contact, duplex pair bearings. These stages are designed to achieve maximum possible throughput without compromising on precision, regardless of whether the application requires a smooth, continuous movement or a fast step and settle process. Also allowing decent sized apertures, those rotational stages are used in a broad selection of applications and industries such as industrial manufacturing, photonics or semiconductor metrology. Micron II Rotary: AI-TM-(DIAMETER)RA-UII
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ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications. To know more about this family of stages, check out the spec sheet.
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ALIO Industries' open-center rotary stages utilize tangential linear direct drives with angular contact bearings for up to +/-7.5 degrees of angular movement and an extreme aperture. These stages are ideal for high-precision applications, including the semiconductor, metrology, and life science industries. With rigid bearings and a powerful linear direct motor, they are designed to meet the high-throughput needs of the high-precision market. Download our product spec sheet for more details.
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