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3250 High Vacuum Wafer Furnace
SynthesisInstrumentation

3250 High Vacuum Wafer Furnace

By Palomar Technologies, Inc.

The SST 3250 is a high vacuum multi-atmosphere sealing furnace that has been designed for lid sealing on wafers of 150-200mm diameter. The system is fully operational at vacuum levels of 10E-07 Torr up to 12 psig with automatic selection and control of up to three process gasses. A closed-loop electronic pressure controller with integral capacitance manometer provides fine control of pressure and flow throughout the full operating range of the system. Category SST High Vacuum Furnaces Processes Glass to Metal Sealing, High vacuum MEMs Packaging, Hermetic Package Sealing, Solder Paste Reflow Attach, Fluxless Eutectic Solder Attach Applications - MEMS Package Sealing - Void-Free Eutectic Die Attach - Infrared Sensor Package Sealing - Low Moisture Package Sealing - Wafer Level Packaging - Military Electronic Package Sealing Key Features Run Analyzer Run analyzer provides ability to graphically review data from logged profiles and export data. This includes real-time display of the thermal and pressure profiles as well as the ability to aid in process development by helping identify plating or material changes in your products.

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