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KB Mirror positionner M1
ManipulatorsInstrumentation

KB Mirror positionner M1

By ISP System

4-axis positioning: Tx – Motorised translation along the X axis; Rx, Rz, Rs – Motorised rotation along the X, Z and S axes M1 vertical focusing mirror Translation Tx / Fine-tuning - Travel: ± 2 mm - Resolution: < 10 µm - Accuracy: ± 10 µm Rx rotation / Fine-tuning Rx rotation / Fine adjustment - Travel: ± 3° - Resolution: < 2 µrad - Accuracy: ± 4 µrad Rotation Rz / Fine adjustment - Travel: -0.1 to +0.2° - Resolution: 0.1 µrad - Accuracy: ± 1 µrad Rotation Rs / Fine adjustment - Travel: -0.1 to +0.2° - Resolution: 0.1 µrad - Accuracy: ± 7 µrad M1 mirror fitted with a water-cooling system

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