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FEI FIB200-P Focused Ion Beam

By TSS Microscopy

(TSS#6149) This FEI FIB200 uses the pre-lens ion column. This FIB is used for circuit edit (front and back side), defect and failure analysis, TEM lamella prep, nanofabrication, nanoprototyping and MEMS. This FEI FIB200-P includes: - Pre-lens column 5-30kV, with excellent beam profile and stability - Milling Power: 11nA beam current - CDEM for ions and electron images with 7nm image resolution - Windows OS and FEI UI; TSS networking computer to make IT happy - 5-axis, comp-eucentric tilt stage - Full coverage of 70mm diameter - Motorized XYXR: 50 x 50 x 25mm x n x 360° x Manual T -15° +60 - Front door load - Chamber scope for real time observation - Gas Injection System: Max 4 injectors; 2 included, chemistry of choice - Vacuum System: column IGP, air cooled Turbo and mechanical PVP - Includes installation & operational training (North America)* * Installation outside of North America will be quoted. - 90 day warranty Available Options Include: - GIS chemistries - Plasma Cleaner - Infrared camera for backside editing - Omniprobe for lift out - Omniprobe for probing - Dry pump to replace mechanical oil PVP Included With Instrument: 90 Day Warranty, Basic Operational Training.

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