
By Micro-Hybrid Electronic GmbH
Our IR emitters ensure reliable results in NDIR gas analysis and combine advanced technologies with MEMS chips manufactured in-house.

MicroSENS 100-VS | 7208.01-B.00 NDIR Gas sensor for CO2 measurement in incubators, vapour sterilizable at 100 °C - NDIR gas sensor for CO₂ measurement in incubators, vapour sterilizable at 100 °C (sensor head) - Direct installation inside the incubation chamber to measure the actual atmosphere experienced by the cells - Measuring range: 0 … 20 Vol.-% CO₂ (optimized for accurate monitoring up to 5 Vol.-%) - IR dual-beam technology - Temperature + pressure compensated and humidity compensation - Accuracy ± (2% of reading + 0.2 Vol.-%), repeatability < 0.11% FS, response time t90 < 25 s (with filter), digital resolution 0.001 Vol.-% - Long-term stability: ≤ ± 0.2 Vol.-% at 5 Vol.-% / year The MicroSENS 100-VS is an NDIR diffusion sensor designed for CO₂ monitoring and control in incubators and shakers. The sensor is placed inside the chamber to measure the CO₂ concentration directly in the cell culture environment. Using infrared absorption, the sensor determines the CO₂ concentration reliably and precisely. This version is based on the proven MicroSENS platform and is optimized for accurate CO₂ monitoring up to 5 Vol.-% to maintain ideal conditions for cell and tissue growth. It is intended for incubator and shaker OEMs as well as lab device manufacturers who need reliable CO₂ measurement in demanding cultivation environments. The sensor delivers high reliability and long service life thanks to its specially developed dual-beam NDIR method. Decontamination is straightforward, effective, and reliable through steam sterilization at 100 °C. The sensor is resistant to cleaning agents and supports low maintenance and minimal follow-up costs. Sterilization with the sensor installed reduces the risk of cross-contamination and simplifies handling. For excellent measurement results, the sensor is temperature and pressure compensated and includes humidity compensation, which is important for stable performance in humid incubator and shaker atmospheres. Digital and analog interfaces enable easy integration and straightforward communication with control electronics. The mechanical design enables flexible use, also for retrofit and retrofitting applications, and simplifies integration and replacement. Its robust stainless steel housing (1.4404) ensures durability and allows repeated sterilization at 100 °C. Application-specific core components and electronic modules are manufactured in-house. We rely on specified core components and electronic modules from our own production. Temperature-resistant components reduce the negative influence of high temperatures on service life. Combined with strict quality controls, this supports excellent delivery reliability and long product lifetime. Find all technical details in the datasheet. The standard version is available from stock, and customized adaptations of the sensor head can be offered for specific OEM requirements. Our experts are happy to advise on scale pricing and project-specific needs. Technical Data Maximum measuring range 20 Vol.-% Gas supply Diffusion Warm-up time at startup < 15 s Heating time for full specifications < 5 min IP protection class (default value) Sensor head IP54, area near connector plug IP30 Repeatability < 0,11 % FS Accuracy ± (2 % of reading + 0.2 Vol.-%) Response time with filter < 25 s Digital resolution 0.001 Vol.-% Temperature influence 0,125 % FS / 10 K Pressure influence 0,004 % FS / 10hPa Long-term stability ≤ ± 0.2 Vol.-% at 5 Vol.-% / year Operating voltage (analog connection) 15 - 24 V DC Operating voltage (digital connection) 12 - 24 V DC Nominal power consumption < 2 W Digital output signal RS485 Analog output signal Current 4 - 20 mA Minimum operating temperature 0 °C Maximum operating temperature 60 °C Minimum storage temperature -20 °C Maximum storage temperature 85 °C Maximum sterilization temperature 100 °C Environmental humidity 0... 95 % relative humidity (non condensing) Minimum air pressure 500 hPa Maximum air pressure 1,200 hPa Measuring gas carbon dioxide
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CO₂ incubator sensor for OEMs PFAS-free sensor head and filter concept - precise CO 2 control from 0-20 vol.%, developed for the harsh reality in cell incubators: humidity, sterilization, long-term operation. Implementing PFAS requirements in CO 2 incubators without compromising on performance and reliability is a key issue for many OEM teams right now. MicroSENS CO 2 180 PFAS-free supports precisely this: a PFAS-free design in the wetted, gas-exposed materials of the sensor head (incl. filter concept) - combined with a stable NDIR measurement for the range 0-20 vol.% CO 2. Why OEM teams choose the MicroSENS CO 2 180 PFAS-free PFAS-free sensor head PFAS-free design for all gas-exposed materials, including the filter concept in the sensor head. CO 2 Range 0–20 % Incubator-specific measuring range for precise CO 2 control and reliable monitoring inside the device. Sterilizable up to 180 °C Ideal for heat sterilization: typically 180 °C, short-term exposure up to a maximum of 190 °C. Dualbeam NDIR stable Dualbeam-NDIR technology reduces drift and ensures stable long-term CO 2 measurements. In-operation compensation Temperature, pressure, and humidity compensation ensure stable and accurate readings. 5-point calibration 5-point calibration improves linearity and accuracy across the entire measurement range. OEM-ready Integration Digital and analog interfaces, plus a standardized feedthrough concept for integration. Support PFAS compliance - with PFAS-free sensor head & filter concept 1 Support PFAS compliance The MicroSENS CO 2 180 PFAS-free is designed so that no intentionally added PFAS are used in the gas-exposed components of the sensor head - including the filter concept. This helps implement PFAS compliance strategies in incubator projects pragmatically: lower risk in material assessment, less documentation effort and a solution that aligns with international sustainability goals and PFAS-restrictive applications. In short: Designed PFAS-free - built for real-world incubator conditions. 2 Stable CO₂ measurement (0–20 vol.%) For excellent measurement results, the sensor is temperature- and pressure-compensated and additionally features humidity compensation — crucial for the humid incubator atmosphere. The dual-beam NDIR method provides high long-term stability and minimizes drift compared to alternative measurement principles. Another advantage for development teams: the 5-point calibration improves linearity compared to many common 3-point concepts on the market. This ensures the measurement remains precise and well controllable not only around typical setpoints (e.g., 5 vol.%), but across the entire 0–20 vol.% range. 3 Faster to series production: easy integration Digital and analog interfaces enable straightforward communication with the incubator control electronics. In addition, the MicroSENS CO 2 180 PFAS-free — like all MicroSENS sensors — uses an identical feedthrough concept for the incubator rear wall. This reduces OEM integration effort and simplifies replacement within consistent incubator designs. Because sterilization is possible with the sensor head installed, the risk of cross-contamination is reduced — and handling during operation becomes easier. At the same time, the design for a high number of sterilization cycles helps minimize maintenance and follow-up costs.
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Sulphur hexafluoride is still indispensable in many applications as a trace, protective or insulating gas. Due to the high greenhouse effect of SF 6, responsible handling of the gas is all the more important. The MicroFLOW SF6.100 Vol.-% sensor is suitable for a wide range of demanding applications that require precision and reliability. FIELDS OF APPLICATION Industry:SF 6 is used in plasma etching processes to create precise patterns on semiconductor materials such as silicon, silicon dioxide and other compounds. The gas is used in special etching chambers where it is converted into a plasma by applying high-frequency energy. This plasma then reacts selectively with the material and enables the precise engraving or removal of materials in a very controlled and accurate process. In the production of aluminum, sulfur hexafluoride is used as a tracer gas to improve the efficiency of the production process and detect potential problems at an early stage. It is also used in this area to monitor the quality and consistency of the end product. Energy technology: In the field of electricity supply, SF 6 is used as an insulating gas and cooling medium in high-voltage switchgear and transformers. The measurement of sulphur hexafluoride is important in order to identify leaks at an early stage and to monitor the condition of the systems. MEASUREMENT ACCURACY Our NDIR gas sensor achieves precise results when measuring and monitoring sulfur hexafluoride. With 10-point linearization, the maximum deviation of the measured gas concentration is less than one percent over the entire measuring range up to 100 percent by volume. The sensor reliably detects minimal gas concentrations to recognize even the smallest changes in the gas mixture. You are free to choose your application's measuring range, such as 90 vol.-%, from the full measuring range of 0 to 100 vol.-%. Any deviations resulting from pressure fluctuations or barometric changes are compensated for with the µP.sens pressure sensor in the cuvette block (< 0.1 % / 10 hPa), eliminating any potential leaks or falsification of measured values. The module's overall space requirement is reduced in comparison to similar sensors by integrating the pressure sensor into the cuvette block. Temperature compensation is ensured for each sensor. Testing and calibration of each module take place in the climate chamber, recording and adjusting the error curve during measurement with a test gas of specific concentration. The test and calibration are performed at the operating range of the sensor from 5 to 45 °C, including the zero and span points, as well as at other typical temperatures within the operating range of the sensor. The maximum deviation is less than 1 % per 10K. RANGE OF FUNCTIONS The RS232 and CAN-Bus digital interfaces commonly used in industry are available as standard. Select an interface for your configuration using the optional accessories and the MARS light software. Follow the software manual for instructions. The cuvette is optimized for measuring sulphur hexafluoride up to 100% by volume. Compared to conventional sensors, our sensor permits measurements in a wide pressure range of 300 - 1200 hPa. For instance, the sensor is suitable for higher geographical locations or systems that require negative pressure measurement. LIFETIME The anodized aluminum gas connection blocks ensure long service life and reliability in harsh environmental conditions. The stainless steel gas connections additionally enhance durability. Tests conducted in the climatic chamber within the operating temperature range eliminate premature component failures. INSTALLATION AND OPERATION Download the MARS light software for gas sensors at no cost and get started with your gas sensor right away. The software eliminates the need to create your own and saves you time on initial test measurements. Consuming less than 1 watt, the sensor can be be used with battery-powered devices. Integration is easy, with a wide voltage range of 9 to 30 volts, allowing it to connect with most existing systems. Gases may require pre-cooling or heating for analysis, depending on the specific needs. To prevent potential gas condensation effects in the cuvette, it is possible to monitor the gas temperature in the measurement system. Our modular design makes cleaning and maintenance simple, unlike many comparable products. Detailed information on installation and operation can be found in the user manual. Our data sheet briefly lists the most important technical details. We will be happy to advise you on your individual questions and requirements.
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ACC5703-8-SA-U/I | 7418.02-A.00 The ACC570x sensors detect the smallest vibrations and are ideal for monitoring wind turbines and electrical machines. - High accuracy and resolution for precise measurements - Extremely stable measurement signal, even with strong temperature fluctuations - Digital RS485 interface and freely scalable analog outputs - High interference immunity with increased EMC requirements - Ideal for integration into machines and systems Ideal for integration into machines and systems The analog accelerometers in the ACC570x series are suitable for static and dynamic acceleration measurements. They record accelerations in one, two or three axes. The sensors are frequently used in applications where maximum precision is required in harsh environmental conditions. The complete electronics are housed in a sealed die-cast aluminum housing and designed for an operating temperature of up to 125 °C. Due to the high temperature stability, a high measuring accuracy is achieved even with strong fluctuations in the ambient temperature. The housing offers excellent interference immunity for increased EMC requirements in the immediate vicinity of electromagnetic fields. Areas of application Thanks to the high signal-to-noise ratio, the analog sensors of the ACC570x series measure even the smallest accelerations, such as those that occur in the tower vibrations of wind turbines, bearings or in measuring and calibration systems. Thanks to its high EMC resistance, the sensor is suitable for precise condition monitoring of electrical machines such as generators. In combination with its high temperature stability, the sensor is therefore used in wind turbines to monitor vibrations on drive trains, rotor blades (ice detection) and generators (noise reduction). Variants available: ACC5703-8-SA-U-I only Technical Data Conditions Measuring axes 3 Measuring range± 0,1.... ± 8 g Repeatability° ° Linearity 0.15 % FS Noise 25 µg/√Hz Digital resolution 16 bit Cross sensitivity 1 % FS Maximum frequency 1,000 Hz Digital interface RS485 Ethernet PROFINET EtherCAT EtherNet / IP Sampling rate≤ 4 kHz Analog interface Voltage 0.5 - 4.5 V Current 4 - 20 mA Sensitivity (voltage output)≤ 20 V/g Sensitivity (current output)≤ 80 mA/g Minimum load resistance (voltage output)1,000 Ω Maximum load resistance (current output)390 Ω Temperature influence (sensitivity)± 30 ppm/K Temperature influence (zero point)± 30 ppm/K Minimum operating temperature-40 °C Maximum operating temperature 85 °C Minimum storage temperature-40 °C Maximum storage temperature 85 °C Minimum operating voltage 5 V DC Maximum operating voltage 32 V DC Power consumption 1,5 W Weight 250 g Housing material Die-cast aluminum Connector M12 plug, 8-pin, A-coded IP protection class IP67 Declaration of conformity Shock DIN EN 60068-2-27: 1500 g / 0.5 ms in 3 axes (half-sine)
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