NW
Actuator for moving the wafer
MEMS/NEMSApplications

Actuator for moving the wafer

By Kugler GmbH

The focus is on Kugler ultra-precision components, these are assembled with magnets, coils, temperature sensors, encoders. In the end, you get compact linear actuators based on air bearings or with flexible joints. Application: The movement of wafers in a wafer stepper, the positioning of the entire wafer table. Submicrometer tolerances are understood, the highest level of particle freedom is guaranteed! Here, too, we offer our service for a wide variety of quantities – depending on customer needs.