By Dynavac - High Vacuum Thin Film Deposition
Dielectric Materials - Silicon Dioxide (SiO₂) - Tantalum Pentoxide (Ta₂O₅) - Hafnium Oxide (HfO₂) - Titanium Oxide (TiO₂) - Diamond-Like Carbon (DLC) - Silicon Nitride (Si₃N₄)
Dynavac’s Spectrum Pro Optical Monitoring System ensures process precision and reliability run after run. The system measures and adjusts deposition layer thickness via single wavelength or broadband monitoring giving an unparalleled level of control and automation for your precision optical coatings Dynavac’s Spectrum-Pro Broadband system allows the user to analyze and measure data across the entire spectrum of light. It builds upon the Single Wave Monitor platform, adding intelligent film analysis and in situ re-optimization. Wide-band measurements of coatings are obtained in real-time during deposition with a variety of high-speed spectrometers. Measurements are compared with coating models and adjusted in real-time to achieve coating performance targets. Spectrum Pro highlights - Broadband and single wavelength layer monitoring options - Reflectance, Transmittance; Direct or Indirect, intermittent, continuous monitoring modes available - Multiple detector support; Silicon, InGaAs, and PMT options - Interfaces with OptiLayer’s OptiReOpt to offer in situ coating re-optimization - Dual Monitor mode allows traditional turning point monitoring with secondary detector (QCM)
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Transparent Conductive Oxides (TCOs) - Zinc Tin Oxide (ZTO) - Indium Tin Oxide (ITO) - Aluminum Zinc Oxide (AZO) - Bismuth Tin Oxide (BiOSn) - Bismuth Oxide (BiO)
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A wide selection of substrate tooling and heating choices are available. We also design innovative custom tooling, heating, and material handling solutions. Single rotation - Flat calotte - Segmented fixture - Domed fixture - Flipping mechanism Planetary mechanism - Multi-planet, dual rotation configurations - Water-cooled plantetaries - Custom-engineered tooling
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